※Applicable as July 1st, 2026 (Tax Excluded)
| Instrument List |
With Data Regsitration |
Without Data Regsitration |
||
|---|---|---|---|---|
| Self-Use |
Operation |
Technical |
Self-Use | |
| EB Lithography [JBX-8100FS] | ￥11,000 | Self-use ＋ ￥3,200 |
Self-use ＋ ￥9,600 |
￥16,500 |
| EB Lithography [ELS-BODEN100] | ￥6,600 | ￥9,900 | ||
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] Maskless Lithography [DL-1500iS2] ALD [TFS200] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] FE-SEM+EDX[S-4800] FE-SEM+EDX[SU8000] FE-SEM+EDX[SU8230] |
￥4,400 | ￥6,600 | ||
| Other Instruments | ￥2,200 | ￥3,300 | ||
Important Note
- The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
- 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
- Self-Use: Instruments will be operated on your own upon issue of operation license.
- Operation Training: Training will be given for acquisition of operation license.
- Technical Service: For those who have difficulty visiting NIMS, part of fabrication process will be carried out by staff.
- Instrument usage charges are included in the unit prices for operation training/technical service.
- When depositing gold (Au) using a deposition system, an Au material usage fee will be charged according to the film thickness.
* "Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).