NIMS Nanofabrication Unit Price Table (Large Enterprises) *1
※Applicable as of July 1st, 2026 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use |
Operation Training |
Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥30,500 | Self-use ＋ ￥8,000 |
Self-use |
¥58,000 | Self-use ＋ ￥16,000 |
Self-use ＋ ￥48,000 |
¥75,400 | Self-use ＋ ￥20,800 |
Self-use ＋ ￥41,600 |
| EB Lithography [ELS-BODEN100] | ¥19,500 | ¥36,000 | ¥46,800 | ||||||
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] Maskless Lithography [DL-1500iS2] ALD [TFS200] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥14,000 | ¥25,000 | ¥32,500 | ||||||
| Other Instruments *3 | ¥8,500 | ¥14,000 | ¥18,200 | ||||||
NIMS Nanofabrication Unit Price Table (Small to Medium Enterprises) *1
※Applicable as of July 1st, 2026 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use |
Operation Training |
Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥25,000 | Self-use ＋ ￥6,400 |
Self-use ＋ ￥19,200 |
¥30,500 | Self-use ＋ ￥8,000 |
Self-use ＋ ￥24,000 |
¥39,650 | Self-use ＋ ￥10,400 |
Self-use ＋ ￥31,200 |
| EB Lithography [ELS-BODEN100] | ¥16,200 | ¥19,500 | ¥25,350 | ||||||
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] Maskless Lithography [DL-1500iS2] ALD [TFS200] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥11,800 | ¥14,000 | ¥18,200 | ||||||
| Other Instruments *3 | ¥7,400 | ¥8,500 | ¥11,050 | ||||||
NIMS Nanofabrication Unit Price Table (Start-ups・Academia) *1
※Applicable as of July 1st, 2026 (Tax Excluded)
| ARIM (Data Provision) *2 | ARIM (No Data Provision) | NOF (Undisclosed Use) | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Instrument List | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service | Self-Use | Operation Training | Technical Service |
| EB Lithography [JBX-8100FS] | ¥14,000 | Self-use ＋ ￥3,200 |
Self-use ＋ ￥9,600 |
¥19,500 | Self-use ＋ ￥4,800 |
Self-use ＋ ￥14,400 |
¥25,350 | Self-use ＋ ￥6,240 |
Self-use ＋ ￥18,720 |
| EB Lithography [ELS-BODEN100] | ¥9,600 | ¥12,900 | ¥16,770 | ||||||
| Laser Lithography [DWL66+] Maskless Lithography [DL-1000/NC2P] Maskless Lithography [MLA150] Maskless Lithography [DL-1500iS2] ALD [TFS200] ICP-RIE [RV-APS-SE] ICP-RIE [Spica #1] ICP-RIE [Spica #2] Ion Beam Milling [16IBE] FE-SEM+EDX [S-4800] FE-SEM+EDX [SU8000] FE-SEM+EDX [SU8230] |
¥7,400 | ¥9,600 | ¥12,480 | ||||||
| Other Instruments *3 | ¥5,200 | ¥6,300 | ¥8,190 | ||||||
*1 Capital stock over 100 million yen = large enterprise, less than 100 million yen = small to medium-sized enterprise.
If you're Start-up, please contact us.
*2 Applicable only when “data provision” is selected and the data is registered on RDE system.
*3 ARIM (Data Provision) is not available for some equipment.
Remarks
- The table above shows the unit price per hour (tax excluded) and it will be multiplied by the usage hours*.
- 15-minute reservation is the minimum unit and the usage less than that time shall be reserved for 15 minutes.
- Self-Use: Instruments will be operated on your own upon issue of operation license.
- Operation Training: Training will be given for acquisition of operation license.
- Technical Service: For those who have difficulty visiting NIMS, part of fabrication process will be carried out by staff.
- Instrument usage charges are included in the unit prices for operation training/technical service.
- If lockers or other facilities are used (occupied) on a continuous basis, charges will apply as part of the cleanroom facility usage fee.
- When depositing gold (Au) using a deposition system, an Au material usage fee will be charged according to the film thickness.
* "Usage hours" means the reservation time (=occupation of the instrument: including the time necessary for starting up/shutting down ).